淺議微機械元件和儀器新進展.doc
約6頁DOC格式手機打開展開
淺議微機械元件和儀器新進展,本文共計6頁，4395字；new progress of mems component and instrument[abstract]： mems component and instrument are suitable for batch manufacture and have the...
內(nèi)容介紹
此文檔由會員 霜天盈月 發(fā)布
淺議微機械元件和儀器新進展
本文共計6頁，4395字；
New Progress of MEMS Component and Instrument
[Abstract]： MEMS component and Instrument are suitable for batch manufacture and have the advantage of low price, high reliability, smaller volume and large-scale integration. In this decade a great progress has been made in the research,development and marketing of this field, which suggests a bright future.
[關(guān)鍵詞]: 微機械元件,微機械儀器,多功能絕對壓力傳感器,醫(yī)用壓力傳感器,加速度傳感器,CMOS傳感器、微機械電泳儀、微機械質(zhì)譜儀、微機械細胞計、微機械染色體鏈成反應(yīng)儀、微機械重金屬探測儀、微機械血液測試儀。
[摘要] :微機械元件和微機械儀器，適于大批量生產(chǎn)，具有成本低廉、性能優(yōu)良和體積微小及集成度高的特點，近十年來，研制、開發(fā)及市場擴大方面取得了巨大的進展，展現(xiàn)了美好的前景。
目錄：
[正文]：
一、前言
二、微機械元件
（一） 微機械元件應(yīng)用
(二)、市場預(yù)測
三、微機械儀器
四、結(jié)論
部分參考文獻
1. J. Bryzek, Impact of MEMS technology on society, Sensors and Actuators A 56 (1996), 1~9
2. J. Bryzek, New generation of disposable blood pressure sensors, Proc. Sensors Expro, Detroit, MI, USA. 1987
3. J. Bryzek, etc., Silicon sensors and micro structures in health care industry, Proc. Sensors, Expro,
4. W. Kuchuel, A surface machined silicon accelerometer with on-chip detection circuitry, Sensory and Actuators, A, 45(1994),7-16
5. BIS Strategic Decision: Automotive components forecast II: Sensors market study, 1993.
本文共計6頁，4395字；
New Progress of MEMS Component and Instrument
[Abstract]： MEMS component and Instrument are suitable for batch manufacture and have the advantage of low price, high reliability, smaller volume and large-scale integration. In this decade a great progress has been made in the research,development and marketing of this field, which suggests a bright future.
[關(guān)鍵詞]: 微機械元件,微機械儀器,多功能絕對壓力傳感器,醫(yī)用壓力傳感器,加速度傳感器,CMOS傳感器、微機械電泳儀、微機械質(zhì)譜儀、微機械細胞計、微機械染色體鏈成反應(yīng)儀、微機械重金屬探測儀、微機械血液測試儀。
[摘要] :微機械元件和微機械儀器，適于大批量生產(chǎn)，具有成本低廉、性能優(yōu)良和體積微小及集成度高的特點，近十年來，研制、開發(fā)及市場擴大方面取得了巨大的進展，展現(xiàn)了美好的前景。
目錄：
[正文]：
一、前言
二、微機械元件
（一） 微機械元件應(yīng)用
(二)、市場預(yù)測
三、微機械儀器
四、結(jié)論
部分參考文獻
1. J. Bryzek, Impact of MEMS technology on society, Sensors and Actuators A 56 (1996), 1~9
2. J. Bryzek, New generation of disposable blood pressure sensors, Proc. Sensors Expro, Detroit, MI, USA. 1987
3. J. Bryzek, etc., Silicon sensors and micro structures in health care industry, Proc. Sensors, Expro,
4. W. Kuchuel, A surface machined silicon accelerometer with on-chip detection circuitry, Sensory and Actuators, A, 45(1994),7-16
5. BIS Strategic Decision: Automotive components forecast II: Sensors market study, 1993.
